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HOT CHUCK / COOLING
HOT CHUCK / COOLING
>
HOT CHUCK
>
4" Low Noise DC HotChuck (HT-4)
4" Low Noise DC HotChuck (HT-4)
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»óÇ°¸í : 4" Low Noise DC HotChuck (HT-4)
¸ðµ¨¸í : HT-4
¼ö·® :
ÆǸŰ¡°Ý : °ßÀû°¡
--- Temperature Range(¼±ÅÃ) ---
Ambient~100¡É (HT-100-4)
Ambient~150¡É (HT-150-4)
Ambient~200¡É (HT-200-4)
Ambient~300¡É (HT-300-4)
Ambient~400¡É (HT-400-4)
Ambient~500¡É (HT-500-4)
Ambient~600¡É (HT-600-4)
Ambient~700¡É (HT-700-4)
--- pA Measurement Kit(¼±ÅÃ) ---
pA Measurement Kit
--- Cooling(¼±ÅÃ) ---
Water Cooling Tank
Refrigeration Cooling Unit
--- Chuck Plating(¼±ÅÃ) ---
Gold Plated Chuck
Nickel Plated Chuck
--- Interface Kit(¼±ÅÃ) ---
RS232 Interface Kit
GPIB Interface Kit
¡ØºÎ°¡¼¼ Á¦¿Ü Ç°¸ñ ÀÔ´Ï´Ù.
¡Û Low Noise DC Power Hot Chuck
¡Û Specification:
- Chuck Size: Gold Plated Hot Chuck 4"
- Chuck Planarization: +/- 10um
- Temp. Range: Ambient ~ 300¡É
- Temp. Accuracy: +/- 0.5¡É
- Power to Heat: DC
- Material: Stainless Steel
- Dimension: 350mmW X 300mmD X 150mmH (Controller), Weight: 20 Kg
¡Û Additional Items:
- Water Chiller
- 2 water lines for cool down and temp. isolation
- N.W: 9.5Kg (G.W:12Kg)
- Radiating Capacity: 50W/¡É
- Max. pump lift: 10M
- Dimension: 40mmW x 27mmD x 37mmH
¡Û Additional Items:
- Probing Set
- Bacuum based & left/right hand
- Resoulution: 80TPI (Thread Per Inch)
- X-Y-Z Movement: 12mm-12mm-12mm
- Dimension: 52mmW x 96mmD x 76mmH
- Weight: 550grams
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